The number of
secondary electrons generated per
primary electron for a given specimen and experimental conditions. It depends on the (mean)
atomic number of the excited area of the sample, the
angle between electron beam and sample surface, the primary electron energy, thickness
of the sample and sample potentials.
Source:
PAC, 1983, 55, 2023
(Nomenclature, symbols and units recommended for in situ microanalysis (Provisional))
on page 2026