scanning electron microscopy (SEM)

Any analytical technique which involves the generation and evaluation of secondary electrons (and to a lesser extent back scattered electrons) by a finely focused electron beam (typically 10 nm or less) for high resolution and high depth of field imaging.
Source:
PAC, 1983, 55, 2023 (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2024