Any technique which measures the angular intensity distribution of electrons '
reflected' from a crystalline surface under bombardment with high energy electrons near grazing
incidence. The
diffraction pattern provides very surface sensitive information (information depth

)
on the atomic arrangement of the top layers of a solid.
Source:
PAC, 1983, 55, 2023
(Nomenclature, symbols and units recommended for in situ microanalysis (Provisional))
on page 2025