planar film

A film whose boundaries are represented by ideal parallel planes. The planar film thickness is defined as the distance between these planes. The terms nanometre thick film, micrometre thick film and millimetre thick film refer specifically to film thickness in the ranges $0.1$ - $100 nm$ , $0.1$ - $100 µm$ and $0.1$ - $100 mm$ , respectively.

Source:

PAC, 1994, 66, 1667 (Thin films including layers: terminology in relation to their preparation and characterization (IUPAC Recommendations 1994)) on page 1671