A
photoimaging material, generally applied as a
thin film, whose local
solubility properties can be altered photochemically. A subsequent development step produces
an image which is useful for the fabrication of microelectronic devices (e.g. integrated
circuits).
Source:
PAC, 1996, 68, 2223
(Glossary of terms used in photochemistry (IUPAC Recommendations 1996))
on page 2265