Any technique which measures the angular intensity distribution of
electrons reflected from a crystalline surface under bombardment with low energy electrons
(
) in larger angles of incidence. The
diffraction pattern also provides very surface sensitive information on the atomic arrangement
of the top layers of a solid.
Source:
PAC, 1983, 55, 2023
(Nomenclature, symbols and units recommended for in situ microanalysis (Provisional))
on page 2025