) ions in which the bombarding particles scattered by the sample are detected and recorded
as a function of energy and/or angle. This technique is used mainly for determining the composition and structure of the
first few atomic layers of a sample.
Source:
PAC, 1979, 51, 2243
(General aspects of trace analytical methods - IV. Recommendations for nomenclature,
standard procedures and reporting of experimental data for surface analysis techniques)
on page 2246