Any technique in which the specimen is bombarded by a focused beam of (primary) ions
(diameter less than
) and the (secondary) ions ejected from the specimen are detected after passage through
a
mass spectrometer.
Source:
PAC, 1983, 55, 2023
(Nomenclature, symbols and units recommended for in situ microanalysis (Provisional))
on page 2025
PAC, 1979, 51, 2243
(General aspects of trace analytical methods - IV. Recommendations for nomenclature,
standard procedures and reporting of experimental data for surface analysis techniques)
on page 2246