ion probe microanalysis (IPMA)

Any technique in which the specimen is bombarded by a focused beam of (primary) ions (diameter less than 10 µm) and the (secondary) ions ejected from the specimen are detected after passage through a mass spectrometer.
Source:
PAC, 1983, 55, 2023 (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2025
PAC, 1979, 51, 2243 (General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2246