Any technique which utilizes the
diffraction of X-rays generated in a microstructural domain of a solid under bombardment with
a finely focused electron beam, thus providing an X-ray
diffraction pattern of this microstructural domain. The pattern can be recorded with a
film either on the reflection or
transmission side of the specimen (in the latter case the crystalline sample has to be a
thin film or a small particle).
Source:
PAC, 1983, 55, 2023
(Nomenclature, symbols and units recommended for in situ microanalysis (Provisional))
on page 2025