'
CVDdiamond' or '
low-pressure diamond' are synonyms of the term
diamond by
CVD.
Diamond by
CVD can be prepared in a variety of ways. Deposition parameters are: total (low) pressure,
partial hydrogen pressure, precursor molecules in the gas phase, temperature for
activation of the hydrogen and that of the surface of the underlying substrate. The energy supply
for the hydrogen
activation may be, for instance: heat, radio frequency, microwave excitation (plasma deposition)
or accelerated ions (e.g.
Ar+ ions).
CVDdiamond has also been obtained at atmospheric pressure from oxyacetylene torches and by other
flame-based methods. Often
CVD carbon films consist of a mixture of
- and
-hybridized carbon atoms and do not have the three-dimensional structure of the
diamond lattice. In this case they should be called
hard amorphous carbon or
diamond-like carbon films.