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sputter yield

The number of particles sputtered from the surface of a target per primary ion.
Source:
PAC, 1979, 51, 2243 (General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2247
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IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997). XML on-line corrected version: http://goldbook.iupac.org (2006-) created by M. Nic, J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8. https://doi.org/10.1351/goldbook.
Last update: 2014-02-24; version: 2.3.3.
DOI of this term: https://doi.org/10.1351/goldbook.S05896.
Original PDF version: http://www.iupac.org/goldbook/S05896.pdf. The PDF version is out of date and is provided for reference purposes only. For some entries, the PDF version may be unavailable.
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