Any technique using high energy particles directed toward a sample, in which the bombarding
particles are detected and recorded as function of energy and/or
angle. The technique is mostly used for determining depth distributions of elements based
on the energy of the backscattered particle. In general,
He+
or
H+
particles are used at energies in the order of
to some
. Also referred to as backscattering
spectrometry
(
BSS).
Source:
PAC, 1979, 51, 2243
(General aspects of trace analytical methods - IV. Recommendations for nomenclature,
standard procedures and reporting of experimental data for surface analysis techniques)
on page 2246
Cite as:
IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by
A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997).
XML on-line corrected version: http://goldbook.iupac.org (2006-) created by M. Nic,
J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8.
https://doi.org/10.1351/goldbook.
