Any analytical technique which uses the excitation and evaluation of the characteristic
X-ray spectrum of a solid specimen by a focused electron beam (typically of a diameter
of less than
).
Qualitative and quantitative X-ray analysis is the main feature of
EPXMA. For obtaining supplementary information the
secondary,
back scattered and
absorbed electrons are also frequently observed. Qualitative and quantitative X-ray analysis is, however,
the main feature of
EPXMA.
Source:
PAC, 1983, 55, 2023
(Nomenclature, symbols and units recommended for in situ microanalysis (Provisional))
on page 2024
Cite as:
IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by
A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997).
XML on-line corrected version: http://goldbook.iupac.org (2006-) created by M. Nic,
J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8.
https://doi.org/10.1351/goldbook.
